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Title:: The Design and Evaluation of Au Microelectrode based on ParyleneC as Flexible Microelectrode

Author(s):: HAO Lingling; XIE Xiaobo; HU Yong; XU Shengpu; Institute of Biomedical Engineering, Chinese Academy of Medical Sciences & Peking Union Medical College, Tianjin 300192, China

Keywords:: Visual prosthesis; Microelectrode; Electrochemical mesurements; Electrochemical impedance spectroscopy (EIS); Surface morphology; Flexibility

摘要:: 针对视觉假体关键部件视网膜微电极阵列的结构特点和植入要求，我们设计制作了基于Parylene-C柔性直径为200 μm的圆形视网膜金电极，用于视网膜表层刺激微电极，用三电极测试系统对微电极阵列进行体外电化学阻抗谱测试和眼内植入的柔韧性测试。结果表明，本研究采用的微电极，在降低成本、简化工艺的基础上，无论柔韧性还是电学特性均符合视网膜植入的要求，可用作动物实验的视网膜植入电极。

Abstract:: Considering the structure characteristics and implanting requirements of retina microelectrode array, the key component of retinal prosthesis, implantable epi-retinal Au microelectrode array based on Parylene-C with a diameter of 200 μm were designed and fabricated. To measure electrochemical characteristics of the microelecrode array, electrochemical impedance spectroscopy (EIS) were peformed with the three-electrode test system. Results showed that morphological and electrochemical properties of the flexible gold electrode could meet the requirements of retinal stimulating electrodes. With it, a low cost and simplified manufacturing design of retinal microelectrode can be used in vivo electrophysiological experiments on animals.